Kiyoshi Takamasu: search on Z-Library

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1

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Metrology, Inspection, and Process Control for Microlithography XXVIII - Sidewall roughness and line profile measurement of photoresist and finFET features by cross-section STEM and TEM image for reference metrology

Cain, Jason P., Sanchez, Martha I., Takamasu, Kiyoshi, Okitou, Haruki, Takahashi, Satoru, Inoue, Osamu, Kawada, Hiroki, Kamineni, Vimal, Paul, Abhijeet, Bello, A. F.

Year:

2014

Language:

english

File:

PDF, 311 KB

english, 2014

2

Comparative Evaluation of Estimation of Hole Plate Measurement Uncertainty via Monte Carlo Simulation

Yuka, Miura, Shoichi, Nakanishi, Eiichi, Higuchi, Kiyoshi, Takamasu, Makoto, Abe, Osamu, Sato

Journal:

Precision Engineering

Year:

2019

Language:

english

File:

PDF, 1.03 MB

english, 2019

3

Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage

Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji

Journal:

Precision Engineering

Year:

2011

Language:

english

File:

PDF, 1.02 MB

english, 2011

4

Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy

Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji

Journal:

Precision Engineering

Year:

2011

Language:

english

File:

PDF, 772 KB

english, 2011

5

Diagonal in space of coordinate measuring machine verification using an optical-comb pulsed interferometer with a ball-lens target

Sudatham, Wiroj, Matsumoto, Hirokazu, Takahashi, Satoru, Takamasu, Kiyoshi

Journal:

Precision Engineering

Year:

2016

Language:

english

File:

PDF, 2.25 MB

english, 2016

6

Novel design of ball-lens-based laser tracker using pulsed interferometer

Masuda, Shusei, Nakajima, Hitomi, Winarno, Agustinus, Takamura, Tomohiko, Matsumoto, Hirokazu, Takahashi, Satoru, Takamasu, Kiyoshi

Journal:

Measurement Science and Technology

Year:

2019

Language:

english

File:

PDF, 1.99 MB

english, 2019

7

Study on Improvement Methods of CMM (Coordinate Measuring Machine) in Workshop Environment

OHNISHI, Tohru, TAKASE, Shotoku, TAKAMASU, Kiyoshi

Journal:

Journal of the Japan Society for Precision Engineering

Year:

2010

File:

PDF, 927 KB

2010

8

Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope

Misumi, Ichiko, Gonda, Satoshi, Kurosawa, Tomizo, Takamasu, Kiyoshi

Journal:

Measurement Science and Technology

Year:

2003

Language:

english

File:

PDF, 1.62 MB

english, 2003

9

Three-dimensional surface profile measurement of a cylindrical surface using a multi-beam angle sensor

Chen, Meiyun, Shengli, Xie, Heng, Wu, Takahashi, Satoru, Takamasu, Kiyoshi

Journal:

Precision Engineering

Year:

2019

Language:

english

File:

PDF, 1.24 MB

english, 2019

10

3D profile measurement using color multi-line stripe pattern with one shot scanning

Sinlapeecheewa, Chanin, Takamasu, Kiyoshi

Journal:

Integrated Computer-Aided Engineering

Year:

2005

File:

PDF, 262 KB

2005

11

Scanning dimensional measurement using laser-trapped microsphere with optical standing-wave scale

Michihata, Masaki, Ueda, Shin-ichi, Takahashi, Satoru, Takamasu, Kiyoshi, Takaya, Yasuhiro

Journal:

Optical Engineering

Year:

2017

Language:

english

File:

PDF, 3.01 MB

english, 2017

12

Two-color absolute length measuring method based on pulse repetition interval lengths

Wei, Dong, Aketagawa, Masato, Takamasu, Kiyoshi, Matsumoto, Hirokazu

Journal:

Optical Engineering

Year:

2014

Language:

english

File:

PDF, 769 KB

english, 2014

13

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 21 August 2011)] Dimensional Optical Metrology and Inspection for Practical Applications - Multi-probe system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy on a high-precision micro-coordinate measuring machine

Yang, Ping, Takamura, Tomohiko, Takahashi, Satoru, Takamasu, Kiyoshi, Sato, Osamu, Osawa, Sonko, Takatsuji, Toshiyuki

Year:

2011

Language:

english

File:

PDF, 5.06 MB

english, 2011

14

Present problems in coordinate metrology for nano and micro scale measurements

Kiyoshi Takamasu

Journal:

Year:

2011

Language:

english

File:

PDF, 984 KB

english, 2011

15

Profile measurement of aspheric surfaces using scanning deflectometry and rotating autocollimator with wide measuring range

Ishikawa, Kyohei, Takamura, Tomohiko, Xiao, Muzheng, Takahashi, Satoru, Takamasu, Kiyoshi

Journal:

Measurement Science and Technology

Year:

2014

Language:

english

File:

PDF, 1.09 MB

english, 2014

16

The Estimation Method of Uncertainty of Coordinate Measuring Machine (1st Report) The Estimation of Kinematical Parameter and Uncertainty of Articulated Three-Dimensional Coordinate Measuring Machine

SHIMOJIMA, Ken, FURUTANI, Ryoshu, OZONO, Shigeo, TAKAMASU, Kiyoshi, HIRAKI, Masahiko, ARAKI, Kenji

Journal:

Journal of the Japan Society for Precision Engineering

Year:

2003

File:

PDF, 5.19 MB

2003

17

A new method for high-accuracy gauge block measurement using 2 GHz repetition mode of a mode-locked fiber laser

Chanthawong, Narin, Takahashi, Satoru, Takamasu, Kiyoshi, Matsumoto, Hirokazu

Journal:

Measurement Science and Technology

Year:

2012

Language:

english

File:

PDF, 440 KB

english, 2012

18

New Non-Contact Measurement of Small inside-Diameter Using Tandem Low-Coherence Interferometer and Optical Fiber Devices

Matsui, Kenta, Matsumoto, Hirokazu, Takahashi, Satoru, Takamasu, Kiyoshi

Journal:

Key Engineering Materials

Year:

2012

Language:

english

File:

PDF, 1.07 MB

english, 2012

19

Development of an Evanescent Light Measurement System for Si Wafer Microdefect Detection

Takahashi, S., Nakajima, R., Miyoshi, Takashi, Takaya, Yasuhiro, Takamasu, Kiyoshi

Journal:

Key Engineering Materials

Year:

2005

Language:

english

File:

PDF, 3.00 MB

english, 2005

20

Space position measurement using long-path heterodyne interferometer with optical frequency comb

Wang, Xiaonan, Takahashi, Satoru, Takamasu, Kiyoshi, Matsumoto, Hirokazu

Journal:

Year:

2012

Language:

english

File:

PDF, 2.34 MB

english, 2012

21

SPIE Proceedings [SPIE Measurement Technology and Intelligent Instruments - Wuhan, China (Friday 29 October 1993)] Measurement Technology and Intelligent Instruments - Profile measurements using multi-gray-scale pattern projection

Takamasu, Kiyoshi, Zhu, Li, Uekawa, Tetuo, Kawakami, Kazuhiko, Ozono, Shigeo, Furutani, Ryosyuu

Year:

1993

Language:

english

File:

PDF, 489 KB

english, 1993

22

Measurement of Three Dimensional Objects Using Gray Code Projection (2nd Report)

ASANO, Hidemitsu, OSAWA, Sonko, FURUTANI, Ryoshu, TAKAMASU, Kiyoshi, OZONO, Shigeo, UEKAWA, Akio

Journal:

Journal of the Japan Society for Precision Engineering

Year:

1996

File:

PDF, 929 KB

1996

23

Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope

Misumi, Ichiko, Gonda, Satoshi, Kurosawa, Tomizo, Tanimura, Yoshihisa, Ochiai, Naofumi, Kitta, Jun-ichiro, Kubota, Fumio, Yamada, Mitsuhiko, Fujiwara, Yoshinobu, Nakayama, Yoshinori, Takamasu, Kiyoshi

Journal:

Measurement Science and Technology

Year:

2003

Language:

english

File:

PDF, 243 KB

english, 2003

24

[IEEE The Pacific Rim Conference on Lasers and Electro-Optics (CLEO/PACIFIC RIM) - Shanghai, China (2009.08.30-2009.08.3)] 2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics - Femtosecond optical frequency comb for volume temperature change measurement

Wei, Dong, Takahashi, Satoru, Takamasu, Kiyoshi, Matsumoto, Hirokazu

Year:

2009

Language:

english

File:

PDF, 243 KB

english, 2009

25

SPIE Proceedings [SPIE SPIE's First International Symposium on Fluctuations and Noise - Santa Fe, NM (Sunday 1 June 2003)] Fluctuations and Noise in Biological, Biophysical, and Biomedical Systems - Multifractal heart rate dynamics in human cardiovascular model

Kotani, Kiyoshi, Takamasu, Kiyoshi, Safonov, Leonid, Yamamoto, Yoshiharu, Bezrukov, Sergey M., Frauenfelder, Hans, Moss, Frank

Year:

2003

Language:

english

File:

PDF, 540 KB

english, 2003

26

SPIE Proceedings [SPIE SPIE Europe Optical Metrology - Munich, Germany (Monday 15 June 2009)] Optical Measurement Systems for Industrial Inspection VI - Study on the temporal coherence function of a femtosecond optical frequency comb

Wei, Dong, Lehmann, Peter H., Takahashi, Satoru, Takamasu, Kiyoshi, Matsumoto, Hirokazu

Year:

2009

Language:

english

File:

PDF, 516 KB

english, 2009

27

SPIE Proceedings [SPIE Optical Science, Engineering and Instrumentation '97 - San Diego, CA (Sunday 27 July 1997)] Liquid Crystals - New method for measuring the viscoelastic twist properties of nematic liquid crystals by evanescent wave scattering

Chen, Chien-Ming, Wakida, Keiichi, Hiraki, Masahiko, Takamasu, Kiyoshi, Ozono, Shigeo, Khoo, Iam-Choon

Year:

1997

Language:

english

File:

PDF, 385 KB

english, 1997

28

Model for complex heart rate dynamics in health and diseases

Kotani, Kiyoshi, Struzik, Zbigniew R., Takamasu, Kiyoshi, Stanley, H. Eugene, Yamamoto, Yoshiharu

Journal:

Physical Review E

Year:

2005

Language:

english

File:

PDF, 2.61 MB

english, 2005

29

Development of a Non-Contact Precision Measurement Technique Using Optical Frequency Combs

Onoe, Taro, Takahashi, Satoru, Takamasu, Kiyoshi, Matsumoto, Hirokazu

Journal:

Key Engineering Materials

Year:

2012

Language:

english

File:

PDF, 1.87 MB

english, 2012

30

Study on residual resist layer thickness measurement for Nanoimprint Lithography based on near-field optics

Takahashi, Satoru, Minamiguchi, Shuichi, Nakao, Toshiyuki, Usuki, Shin, Takamasu, Kiyoshi

Journal:

International Journal of Surface Science and Engineering

Year:

2009

Language:

english

File:

PDF, 784 KB

english, 2009

31

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Metrology, Inspection, and Process Control for Microlithography XXVII - Edge determination methodology for cross-section STEM image of photoresist feature used for reference metrology

Takamasu, Kiyoshi, Okitou, Haruki, Takahashi, Satoru, Konno, Mitsuru, Inoue, Osamu, Kawada, Hiroki, Starikov, Alexander, Cain, Jason P.

Year:

2013

Language:

english

File:

PDF, 809 KB

english, 2013

32

Absolute distance measurement based on spectral interferometer using the effect of the FSR of a Fabry–Perot etalon

Chen, Meiyun, Xie, Shengli, Zhou, Guoxu, Wei, Dong, Wu, Heng, Takahashi, Satoru, Matsumoto, Hirokazu, Takamasu, Kiyoshi

Journal:

Optics and Lasers in Engineering

Year:

2019

Language:

english

File:

PDF, 3.10 MB

english, 2019

33

Uncertainty Estimation Using Monte-Carlo Method Constrained by Correlations of the Data

Nara, Masayuki, Abbe, Makoto, Takamasu, Kiyoshi

Journal:

Key Engineering Materials

Year:

2008

Language:

english

File:

PDF, 566 KB

english, 2008

34

Development of high-precision micro-roundness measuring machine using a high-sensitivity and compact multi-beam angle sensor

Chen, Meiyun, Takahashi, Satoru, Takamasu, Kiyoshi

Journal:

Precision Engineering

Year:

2015

Language:

english

File:

PDF, 2.29 MB

english, 2015

35

Evanescent Light Exposing System under Nitrogen Purge for Nano-Stereolithography

Suzuki, Yuki, Tahara, Hiroyuki, Michihata, Masaki, Takamasu, Kiyoshi, Takahashi, Satoru

Journal:

Year:

2016

Language:

english

File:

PDF, 371 KB

english, 2016

36

Measurement of Three Dimensional Objects Using Gray Code Projection (3rd Report)

OSAWA, Sonko, ASANO, Hidemitsu, FURUTANI, Ryoshu, TAKAMASU, Kiyoshi, OZONO, Shigeo

Journal:

Journal of the Japan Society for Precision Engineering

Year:

1998

Language:

english

File:

PDF, 3.05 MB

english, 1998

37

Experimental observation of pulse trains' destructive interference with a femtosecond optical frequency-comb-based interferometer

Wei, Dong, Takahashi, Satoru, Takamasu, Kiyoshi, Matsumoto, Hirokazu

Journal:

Year:

2009

Language:

english

File:

PDF, 315 KB

english, 2009

38

Intelligent Profile Measurement for Wide-Area Resist Surface Using Multi-Sensor AFM System

Liu, Shu Jie, Watanabe, K., Takahashi, Satoru, Takamasu, Kiyoshi

Journal:

Key Engineering Materials

Year:

2008

Language:

english

File:

PDF, 513 KB

english, 2008

39

Multi-beam angle sensor for flatness measurement of mirror using circumferential scan technology

Chen, Meiyun, Takahashi, Satoru, Takamasu, Kiyoshi

Journal:

International Journal of Precision Engineering and Manufacturing

Year:

2016

Language:

english

File:

PDF, 685 KB

english, 2016

40

Absolute Measurement of Baselines up to 403 m Using Heterodyne Temporal Coherence Interferometer with Optical Frequency Comb

Matsumoto, Hirokazu, Wang, Xiaonan, Takamasu, Kiyoshi, Aoto, Tomohiro

Journal:

Applied Physics Express

Year:

2012

Language:

english

File:

PDF, 616 KB

english, 2012

41

Advanced generation of functional dual-periodic microstructured surface based on optical in-process measurement

Takahashi, Satoru, Masui, Shuzo, Michihata, Masaki, Takamasu, Kiyoshi

Journal:

CIRP Annals - Manufacturing Technology

Year:

2020

File:

PDF, 2.12 MB

2020

42

Absolute measurement of gauge block without wringing using tandem low-coherence interferometry

Winarno, Agustinus, Takahashi, Satoru, Hirai, Akiko, Takamasu, Kiyoshi, Matsumoto, Hirokazu

Journal:

Measurement Science and Technology

Year:

2012

Language:

english

File:

PDF, 1013 KB

english, 2012

43

A Multi-Probe Measurement Method to Evaluate the Yaw and Straightness Errors of XY Stage on High Precision CMM

Yang, Ping, Shibata, Shusaku, Takahashi, Satoru, Takamasu, Kiyoshi, Sato, Osamu, Osawa, Sonko, Takatsuji, Toshiyuki

Journal:

Key Engineering Materials

Year:

2010

Language:

english

File:

PDF, 567 KB

english, 2010

44

Comparative evaluation of estimation of step gauge measurement uncertainty via Monte Carlo simulation

Miura, Yuka, Nakanishi, Shoichi, Higuchi, Eiichi, Takamasu, Kiyoshi, Abe, Makoto, Sato, Osamu

Journal:

Precision Engineering

Year:

2018

Language:

english

File:

PDF, 1.01 MB

english, 2018

45

Nanometer profile measurement of large aspheric optical surface by scanning deflectometry with rotatable devices: Uncertainty propagation analysis and experiments

Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu

Journal:

Precision Engineering

Year:

2012

Language:

english

File:

PDF, 965 KB

english, 2012

46

Time-of-flight method using multiple pulse train interference as a time recorder

Wei, Dong, Takahashi, Satoru, Takamasu, Kiyoshi, Matsumoto, Hirokazu

Journal:

Year:

2011

Language:

english

File:

PDF, 1.20 MB

english, 2011

47

Verification of the positioning accuracy of industrial coordinate measuring machine using optical-comb pulsed interferometer with a rough metal ball target

Sudatham, Wiroj, Matsumoto, Hirokazu, Takahashi, Satoru, Takamasu, Kiyoshi

Journal:

Precision Engineering

Year:

2015

Language:

english

File:

PDF, 1.34 MB

english, 2015

48

Diameter Measurement of a Microsphere Based on Whispering Gallery Mode Resonance

MICHIHATA, Masaki, CHU, Bohuai, ZHAO, Zheng, HAYASHI, Kohei, TAKAMASU, Kiyoshi, TAKAHASHI, Satoru

Journal:

Journal of the Japan Society for Precision Engineering

Year:

2018

File:

PDF, 5.41 MB

2018

49

Radial mode number identification on whispering gallery mode resonances for diameter measurement of microsphere

Kobayashi, Yumeki, Michihata, Masaki, Zhao, Zheng, Chu, Bohuai, Takamasu, Kiyoshi, Takahashi, Satoru

Journal:

Measurement Science and Technology

Year:

2019

Language:

english

File:

PDF, 1.36 MB

english, 2019

50

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Metrology, Inspection, and Process Control for Microlithography XXX - 3D-profile measurement of advanced semiconductor features by reference metrology

Sanchez, Martha I., Ukraintsev, Vladimir A., Takamasu, Kiyoshi, Iwaki, Yuuki, Takahashi, Satoru, Kawada, Hiroki, Ikota, Masami, Lorusso, Gian F., Horiguchi, Naoto

Year:

2016

Language:

english

File:

PDF, 1.58 MB

english, 2016

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